Valve device, its control device, control methods using the same, fluid control device and semiconductor manufacturing apparatus
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United States of America Patent
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Nov 30, 2021
Grant Date -
Nov 26, 2020
app pub date -
Nov 12, 2018
filing date -
Nov 24, 2017
priority date (Note) -
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Abstract
A control device for a valve device can detect open/close state of the valve device without using limit switches. The valve device includes a diaphragm for opening and closing a flow path for flowing a fluid, a coil spring for biasing the diaphragm in the closing direction of flow path, a main actuator for driving it against the biasing force of the coil spring, and an adjusting actuator using a piezoelectric element for adjusting the opening degree of the flow path determined by the diaphragm. The controller detects the open/close state of flow path based on the voltage generated by the piezoelectric element of the adjusting actuator, and controls valve device using the detection signal.
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