Simulation apparatus, simulation method, and storage medium
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United States of America Patent
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Nov 9, 2021
Grant Date -
N/A
app pub date -
Mar 27, 2018
filing date -
Jun 13, 2017
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A simulation apparatus includes: a factor amount converting information storage unit in which factor amount converting information, which is information indicating correspondence between low-fidelity information and high-fidelity information, is stored; a writing pattern information storage unit in which writing pattern information is stored; an ADI simulation unit that performs an ADI simulation using one or more evaluation points, for a writing pattern indicated by the writing pattern information, thereby acquiring one or more factor amounts; a converting unit that acquires high-fidelity information, which is one or more factor amounts, corresponding to the low-fidelity information, which is one or more factor amounts, using the factor amount converting information; and an etching simulation unit that performs an etching simulation using the one or more factor amounts acquired by the converting unit.
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International Classification(s)
- H01J:ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- G21K:TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNET....
- G01N:INVESTIGATING OR ANALYSING MATERIALS BY DETERMININ....
- G06F:ELECTRIC DIGITAL DATA PROCESSING
- A61N:ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY;....
- G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....
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