Chemical-mechanical polishing composition comprising benzotriazole derivatives as corrosion inhibitors

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United States of America Patent

PATENT NO 11168239
APP PUB NO 20200255713A1
SERIAL NO

16860793

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Abstract

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A chemical-mechanical polishing (CMP) composition is provided comprising (A) one or more compounds selected from the group of benzotriazole derivatives which act as corrosion inhibitors and (B) inorganic particles, organic particles, or a composite or mixture thereof. The invention also relates to the use of certain compounds selected from the group of benzotriazole derivatives as corrosion inhibitors, especially for increasing the selectivity of a chemical mechanical polishing (CMP) composition for the removal of tantalum or tantalum nitride from a substrate for the manufacture of a semiconductor device in the presence of copper on said substrate.

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Patent OwnerAddress
BASF SECARL-BOSCH-STRASSE 38 LUDWIGSHAFEN 67056

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kaller, Martin Mannheim, DE 21 58
Klipp, Andreas Lambsheim, DE 44 551
Lauter, Michael Mannheim, DE 35 113
Li, Yuzhuo - 62 602
Reichardt, Robert Mannheim, DE 15 40

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