FinFET radiation dosimeter

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11158756
APP PUB NO 20210083139A1
SERIAL NO

16572102

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Abstract

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A semiconductor radiation monitor (i.e., dosimeter) is provided that has an oxide charge storage region located on a first side of a semiconductor fin and a functional gate structure located on a second side of the semiconductor fin that is opposite the first side. Charges are created in the oxide charge storage region that is located on the first side of the semiconductor fin and detected on the second side of the semiconductor fin by the functional gate structure. Multiple semiconductor fins in parallel can form a dense and very sensitive semiconductor radiation monitor.

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Patent Owner(s)

Patent OwnerAddress
INTERNATIONAL BUSINESS MACHINES CORPORATIONNEW ORCHARD ROAD ARMONK NY 10504

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Balakrishnan, Karthik Scarsdale, US 339 2298
Hekmatshoartabari, Bahman White Plains, US 404 1998
Reznicek, Alexander Troy, US 1451 12717
Yau, Jeng-Bang Yorktown Heights, US 145 1486

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