Target assembly for safe and economic evaporation of brittle materials
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United States of America Patent
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Oct 26, 2021
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N/A
app pub date -
May 30, 2018
filing date -
Jun 1, 2017
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Abstract
The present invention discloses a target assembly which allows safe, fracture-free and economic operation of target materials with low fracture toughness and/or bending strength during arc evaporation processes as well as in sputtering processes. The present invention discloses a target assembly for PVD processes, comprising a target, and a target holding device (20), characterized in that the target (10) comprises a first bayonet lock and the target holding device (20) comprises a counterbody for the first bayonet lock of the target and a second bayonet lock for engaging the target assembly in the cooling means of the deposition chamber.
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