Interferometric waviness detection systems
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United States of America Patent
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Oct 12, 2021
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N/A
app pub date -
Dec 17, 2018
filing date -
Aug 7, 2018
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Abstract
An interferometer detection system, including a beam splitter receiving a collimated light signal and splitting the signal into a first light signal and a second light signal. The system includes a first mirror receiving and reflecting the first light signal along a first path. The system includes a second mirror receiving and reflecting the second light signal along a second path via a transparent material. The system includes a 2D photosensor array configured to receive from the beam splitter the reflected first light signal merged with the reflected second light signal double passing through the transparent material and configured to generate an interference fringe pattern. A non-sinusoidal interference fringe pattern indicates geometrical variation between a wavefront of the reflected first light signal along the first path and a wavefront of the reflected second light signal double passing through the transparent material along the second path.
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