High definition heater system having a fluid medium
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United States of America Patent
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Sep 28, 2021
Grant Date -
Aug 17, 2017
app pub date -
Dec 13, 2016
filing date -
Aug 30, 2011
priority date (Note) -
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Abstract
A thermal system includes a base member, a two-phase fluid, a tuning heater, and a chuck. The base member includes at least one fluid passageway. The two-phase fluid is disposed within the fluid passageway. A pressure of the two-phase fluid is controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. The tuning heater is secured to the base member. The chuck is secured to the tuning heater opposite to the base member. The tuning heater includes a plurality of zones to fine tune a heat distribution provided by the base member to the chuck.
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