Method for determining probe angle, high-frequency test system, program and storage medium
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United States of America Patent
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Sep 28, 2021
Grant Date -
Jul 23, 2020
app pub date -
Sep 7, 2018
filing date -
Sep 7, 2017
priority date (Note) -
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Abstract
A method that includes changing a probe angle with respect to the conductor surface of a substrate that has a flat conductor surface mounted on the mounting surface of a stage in a high-frequency test system, thereby changing the state of contact of the tip of a signal terminal and tip of a ground terminal with the conductor surface, outputting high-frequency signals from the signal terminal to the conductor surface and receiving reflected signals using the probe to find S-parameters at different probe angles, and determining, based on a plurality of the S-parameters, a reference probe angle at which the reference line formed connecting the tip of the signal terminal and tip of the ground terminal is parallel with the conductor surface.
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