Fixture comprising magnetic means for holding rotary symmetric workpieces

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11131024
APP PUB NO 20180030595A1
SERIAL NO

15550130

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method for using a fixture system and a fixture system for holding workpieces or parts to be treated by a plasma assisted vacuum process, the fixture system including magnetic means which generate a magnetic field with a magnetic force which is high enough for holding the workpiece or part. The magnetic means of the fixture system are designed and arranged in such a manner that magnetic field lines of the generated magnetic field are largely confined to the space including the fixture system and the body of the workpiece or part, so that a generation of unintended plasma inhomogeneities caused by the magnetic field lines is avoided.

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Patent Owner(s)

  • OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Becker, Jurgen Geisenheim, DE 20 273
Keplinger, Christian Meiningen, AT 2 2
Kim, Dong-Ju Jeollabuk-do, KR 8 26
Vester, Armin Geisenheim, DE 3 3

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