Polishing composition

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United States of America Patent

PATENT NO 11130883
SERIAL NO

16462729

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Abstract

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Provided is a polishing composition that includes a cellulose derivative and is effective for reducing surface defects after polishing. According to the present application, a polishing composition comprising an abrasive, a basic compound and a surface protective agent is provided. The surface protective agent contains a cellulose derivative and a vinyl alcohol-based dispersant. The surface protective agent has a dispersibility parameter α of less than 100.

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Patent Owner(s)

Patent OwnerAddress
FUJIMI INCORPORATED1-1 CHIRYO 2-CHOME NISHIBIWAJIMA-CHO KIYOSU-SHI AICHI 4528502

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asada, Maki Kiyosu, JP 8 17
Tsuchiya, Kohsuke Kiyosu, JP 35 93

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