Micromechanical device and corresponding production method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11130672
APP PUB NO 20200361765A1
SERIAL NO

16636939

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Abstract

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A micromechanical apparatus and a corresponding production method are described. The micromechanical apparatus encompasses a base substrate having a front side and a rear side; and a cap substrate, at least one surrounding trench having non-flat side walls being embodied in the front side of the base substrate; the front side of the base substrate and the trench being coated with at least one metal layer; the non-flat side walls of the trench being covered nonconformingly with the metal so that they do not form an electrical current path in a direction extending perpendicularly to the front side; and a closure, in particular a seal-glass closure, being embodied in the region of the trench between the base substrate and the cap substrate.

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Patent Owner(s)

  • ROBERT BOSCH GMBH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baader, Johannes Haslach, DE 21 20
Pinter, Stefan Reutlingen, DE 86 717
Schorr, Nicolas Reutlingen, DE 4 2
Steigert, Tina Stuttgart, DE 1 2
Straub, Rainer Ammerbuch, DE 30 84

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