MEMS devices with an element having varying widths
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United States of America Patent
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Sep 28, 2021
Grant Date -
Aug 15, 2019
app pub date -
Apr 22, 2019
filing date -
Apr 19, 2012
priority date (Note) -
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Abstract
A device includes a substrate, a routing conductive line over the substrate, a dielectric layer over the routing conductive line, and an etch stop layer over the dielectric layer. A Micro-Electro-Mechanical System (MEMS) device has a portion over the etch stop layer. A contact plug penetrates through the etch stop layer and the dielectric layer. The contact plug connects the portion of the MEMS device to the routing conductive line. An escort ring is disposed over the etch stop layer and under the MEMS device, wherein the escort ring encircles the contact plug.
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