Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure

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United States of America Patent

PATENT NO 11124412
APP PUB NO 20200231433A1
SERIAL NO

16789503

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Abstract

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A manufacturing method for a micromechanical window structure including the steps: providing a substrate, the substrate having a front side and a rear side; forming a first recess on the front side; forming a coating on the front side and on the first recess; and forming a second recess on the rear side, so that the coating is at least partially exposed, whereby a window is formed by the exposed area of the coatings.

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Patent Owner(s)

  • ROBERT BOSCH GMBH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Muchow, Joerg Reutlingen, DE 62 345
Pinter, Stefan Reutlingen, DE 86 717
Straub, Rainer Ammerbuch, DE 30 84

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