Liquid ejecting head, liquid ejecting apparatus, and piezoelectric device
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United States of America Patent
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Sep 21, 2021
Grant Date -
Jul 2, 2020
app pub date -
Dec 23, 2019
filing date -
Dec 26, 2018
priority date (Note) -
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Abstract
A liquid ejecting head includes a diaphragm that constitutes a part of a wall surface of a pressure chamber in which a liquid is filled, and a piezoelectric element that vibrates the diaphragm, in which the piezoelectric element includes a first electrode and a second electrode, and a piezoelectric layer including a first portion located between the first electrode and the second electrode and a second portion not overlapping at least one of the first electrode and the second electrode in plan view, a first surface at an opposite side of the first portion from the diaphragm and a second surface at an opposite side of the second portion from the diaphragm are different in position in a laminate direction of the first electrode, the piezoelectric layer, and the second electrode, and a second film thickness of the second portion is larger than a first film thickness of the first portion.
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