Turbomolecular pump lubricant supply systems
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United States of America Patent
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Sep 7, 2021
Grant Date -
Jul 4, 2019
app pub date -
Jul 31, 2017
filing date -
Aug 4, 2016
priority date (Note) -
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Abstract
A turbomolecular pump has a housing, a rotor shaft supported by a plurality of bearings for rotation relative to the housing about an axis of rotation, a deflector, a lubricant supply system and a lubricant transfer device provided on the rotor shaft. The bearings include a rolling bearing that receives lubricant from the lubricant supply system to via the lubricant transfer device. The rolling bearing is disposed intermediate the lubricant transfer device and the deflector and the deflector is configured to deflect lubricant that passes through the rolling bearing outwardly with respect to the rotor shaft.
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