Compositions comprising base-reactive component and processes for photolithography

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11106137
APP PUB NO 20120122030A1
SERIAL NO

13297258

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprise one or more materials that comprise one or more base reactive groups and (i) one or more polar groups distinct from the base reactive groups, and/or (ii) at least one of the base reactive groups is a non-perfluorinated base reactive group. Particularly preferred photoresists of the invention can exhibit reduced leaching of resist materials into an immersion fluid contacting the resist layer during immersion lithography processing.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
DUPONT ELECTRONIC MATERIALS INTERNATIONAL LLC455 FOREST STREET MARLBOROUGH MA 01752

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cummins, Clark H Midland, US 46 509
Kang, Doris H Shrewsbury, US 7 26
Li, Mingqi Shrewsbury, US 105 434
Liu, Cong Shrewsbury, US 200 768
Ober, Matthias S Midland, US 29 49
Oh, Joon Seok Natick, US 30 133
Wang, Deyan Hudson, US 85 877
Xu, Cheng-Bai Southboro, US 81 642

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Feb 28, 2025
7.5 Year Payment $3600.00 $1800.00 $900.00 Feb 28, 2029
11.5 Year Payment $7400.00 $3700.00 $1850.00 Feb 28, 2033
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00