Substrate holding member
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United States of America Patent
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Aug 24, 2021
Grant Date -
Dec 27, 2018
app pub date -
Jun 20, 2018
filing date -
Jun 26, 2017
priority date (Note) -
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status (Latency Note)
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Abstract
A substrate holding member includes a base, and a plurality of convex parts formed at an upper surface of the base and configured to hold a substrate at top surfaces thereof. Each convex part has a root portion extending from the upper surface of the base, and a top portion formed on the root portion and including the top surface. In each convex part, a cross-sectional area of the root portion is larger than a cross-sectional area of the top portion. At least a portion including the top surface of the top portion is formed of a holding member made of a material having a greater Young's modulus than a material forming the base. The respective holding members are spaced apart from each other.
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