Feedback correction in sub-resonant tapping mode of an atomic force microscope
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United States of America Patent
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Aug 24, 2021
Grant Date -
N/A
app pub date -
Jan 30, 2018
filing date -
Jan 30, 2017
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method of carrying out sub-resonant tapping in an atomic force microscope includes causing a probe that is disposed above a sample to be translated in a direction parallel to a horizontal plane defined by the sample and to oscillate in a vertical direction that is perpendicular to the horizontal plane about an equilibrium line that is separated from the horizontal plane by a vertical offset. As a result, the probe repeatedly taps a surface of the sample. Each tap begins with a first contact of the probe on the surface followed by a progressive increase in force exerted by the sample on the probe until a peak force is attained. The vertical offset is controlled by relying at least in part on a feature other than the peak force as a basis for controlling the vertical offset.
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International Classification(s)
- 2018 Application Filing Year
- G01Q Class
- 112 Applications Filed
- 93 Patents Issued To-Date
- 83.04 % Issued To-Date
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- 0 Citation Count
- G01Q Class
- 0 % this patent is cited more than
- 4 Age
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