Load port having movable member that abuts a pin
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United States of America Patent
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Aug 17, 2021
Grant Date -
Oct 1, 2020
app pub date -
Mar 18, 2020
filing date -
Mar 29, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
A load port includes a first pin projecting on a dock plate and provided on the dock plate so as to be pushed down, and a first detection unit provided on the base portion and configured to detect that the dock plate is located at a first position. The first detection unit includes a movable member capable of displacing in a moving direction of the dock plate, and a first sensor configured to detect the displacement of the movable member. The movable member is arranged at a position to abut against the first pin that is in a pushed down state in a process in which the dock plate moves from a second position to the first position.
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