Supporting frame for pellicles, pellicle, and method for producing same

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United States of America Patent

PATENT NO 11092887
APP PUB NO 20210096457A1
SERIAL NO

16334636

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Abstract

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Provided are: a support frame (1) for pellicle that has both low dust generation property and high light resistance, and further has an ion elution amount which is reduced to the utmost limit to an extent that haze is not generated even when a short wavelength laser is used for an exposure light source, a pellicle (8) using the support frame for pellicle, and a method for efficiently manufacturing the support frame for pellicle. A support frame for pellicle which comprises a frame member (2) comprising aluminum or aluminum alloy, an anodized film (4) formed on the surface of the frame member, and a fluororesin coating layer (6) formed on the surface of the anodized film.

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Patent Owner(s)

Patent OwnerAddress
NIPPON LIGHT METAL COMPANY LTD2-20 HIGASHI-SHINAGAWA 2-CHOME SHINAGAWA-KU TOKYO 140-8628

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishito, Nobuyuki Shizuoka, JP 3 8

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