Laser crystallization device
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United States of America Patent
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Aug 10, 2021
Grant Date -
Dec 14, 2017
app pub date -
Mar 22, 2017
filing date -
Jun 14, 2016
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Abstract
A laser crystallization method includes exciting gas medium in an airtight container to generate laser beams; amplifying the laser beams by reflecting the laser beams between a high reflection mirror and a low reflection mirror respectively disposed facing opposite end portions of the airtight container, wherein a first transparent window and a second transparent window are fixed to respective end portions of the airtight container, and outputting the amplified laser beams; and disposing a cleaning mirror in a path of the laser beams that have propagated through the second transparent window.
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