System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination

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United States of America Patent

PATENT NO 11087955
APP PUB NO 20210035773A1
SERIAL NO

16939706

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Abstract

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A system combination includes a particle beam system and a light-optical system. The particle beam system can be an individual particle beam system or a multiple particle beam system. A light entry mechanism can provided at a branching site of a beam tube arrangement within a beam switch. A light beam of the light-optical system can enter into the beam tube arrangement through the light entry mechanism such that the light beam impinges, in substantially collinear fashion with particle radiation, on an object to be inspected. Parts of the light-optical beam path and parts of the particle-optical beam path can extend parallel to one another or overlap with one another. This arrangement can allow light of the light-optical system to be incident in perpendicular fashion on an object to be inspected, optionally without impairing the particle-optical resolution of the particle beam system.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MULTISEM GMBHCARL-ZEISS-STRASSE 22 OBERKOCHEN 73447

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jacobi, Joerg Herbrechtingen, DE 12 106
Le, Maire Michel Oberkochen, DE 5 46
Schall, Michael Essingen, DE 19 100
Zeidler, Dirk Oberkochen, DE 57 568

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