Electron generating apparatus and ionization gauge
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United States of America Patent
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Jul 20, 2021
Grant Date -
Mar 25, 2021
app pub date -
Sep 14, 2020
filing date -
Sep 19, 2019
priority date (Note) -
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Abstract
An electron generating apparatus includes a filament, a power supply configured to supply power to the filament so as to make the filament emit an electron, and a controller configured to repeatedly detect a value having a correlation with power supplied from the power supply to the filament, determine whether a state of the filament satisfies a notification condition, by using a plurality of detected values, and perform notification when the state satisfies the notification condition.
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