Strain gauge with mechanically decoupled temperature sensor

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United States of America Patent

PATENT NO 11054319
APP PUB NO 20200408621A1
SERIAL NO

17018276

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Abstract

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A semiconductor device includes a strain gauge on a substrate, the strain gauge configured to measure a stress of the substrate; and a temperature sensor disposed within the substrate, the temperature sensor being decoupled from the stress of the substrate.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS S R LAGRATE BRIANZA (MB)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Caltabiano, Daniele Agrate Brianza, IT 21 65

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