Local alignment point calibration method in die inspection

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United States of America Patent

PATENT NO 11043356
APP PUB NO 20200105497A1
SERIAL NO

16700552

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Abstract

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A calibration method for calibrating the position error in the point of interest induced from the stage of the defect inspection tool is achieved by controlling the deflectors directly. The position error in the point of interest is obtained from the design layout database.

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ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN NL-5504 DR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fang, Wei Milpitas, US 197 903
Guo, Zhaohui San Jose, US 27 65
Jau, Jack Los Altos Hills, US 55 721
Liu, Kevin Fremont, US 71 479
Wang, Fei Santa Clara, US 1116 10607

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