Reflective laser-based particle detector
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United States of America Patent
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Jun 22, 2021
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N/A
app pub date -
Oct 18, 2019
filing date -
Oct 18, 2019
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Abstract
A reflective laser-based particle detector for detecting contamination particles moving through a vacuum. Laser light is directed through a vacuum access window in the containment vessel and toward a reflective surface on an inner surface opposite the window. A photonic detector is positioned to monitor reflected laser from the opposite inner surface inside the vessel and is capable of detecting perturbations of the reflected light. The system makes use of optical interferometry techniques embodied as a photonic integrated circuit to detect the particles. The reflective laser-based system can be placed entirely outside the vacuum thereby avoiding the need for breaking the vacuum environment to check for accumulation of contaminant particles.
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