Electrostatic chuck and semiconductor/liquid crystal manufacturing equipment

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11037811
APP PUB NO 20130048217A1
SERIAL NO

13547316

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An electrostatic chuck includes, a chuck function portion including a plurality of chuck regions on which an attractable object is placed respectively, and a concave surface portion provided in an outer region of the chuck regions, and electrodes arranged in an inner part of the chuck function portion corresponding to the chuck regions and an inner part of the chuck function portion corresponding to the concave surface portion, respectively.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
SHINKO ELECTRIC INDUSTRIES CO LTDNAGANO-SHI NAGANO 381-2287

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Shiraiwa, Norio Nagano, JP 16 78

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