Reflective mask blank and reflective mask
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United States of America Patent
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Jun 15, 2021
Grant Date -
Feb 21, 2019
app pub date -
Aug 7, 2018
filing date -
Aug 15, 2017
priority date (Note) -
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Abstract
A reflective mask blank includes a backside conductive film on a back surface of a substrate. The backside conductive film has a laminated structure including a stress compensation layer and a conductive layer in this order from the substrate side. The conductive layer includes a metal nitride. The stress compensation layer has a compressive stress and the stress compensation layer includes at least one compound selected from the group consisting of oxides, oxynitrides, and nitrides, each having an absorption coefficient (k) over the wavelength range of 400 nm to 800 nm being 0.1 or less. The conductive layer has a thickness of 5 nm or more and 30 nm or less. The backside conductive film has a total thickness of 50 nm or more.
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