Modular plasma jet treatment system
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United States of America Patent
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Jun 8, 2021
Grant Date -
Apr 25, 2019
app pub date -
Oct 16, 2018
filing date -
Oct 17, 2017
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Abstract
A modular plasma jet treatment system comprising a plasma source with a high-voltage module comprising a high-voltage electrode and first connection means, as well as a plasma jet applicator wherein the plasma jet applicator comprises a cavity for a process gas, wherein a ceiling portion of the cavity is either arranged on the plasma jet applicator and/or on the high-voltage module, the cavity comprising a process gas inlet and at least one plasma jet outlet, wherein the plasma jet applicator comprises a second connection means, such that the plasma jet applicator and the high-voltage module are repeatedly connectable and releasable, wherein, when the plasma jet applicator is connected to the high-voltage module, the cavity is adjacently arranged with the ceiling portion at the high-voltage module, and wherein the cavity is separated by a dielectric from the high-voltage electrode of the high-voltage module.
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