Low force wafer test probe
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United States of America Patent
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Jun 8, 2021
Grant Date -
N/A
app pub date -
Aug 9, 2019
filing date -
Jul 12, 2016
priority date (Note) -
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Abstract
A probe includes a pedestal and at least one feature extending from the pedestal to engage a surface of a corresponding contact at a position offset from a central longitudinal axis of the contact. The pedestal includes a cavity and the feature can include one or more blades that extend from a periphery of the cavity to a central longitudinal axis of the pedestal. The three blades are configured to engage the surface of the contact. The three blades can be positioned within the cavity to provide a 120-degree rotational symmetry about the central longitudinal axis of the pedestal.
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