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United States of America Patent

PATENT NO 11020894
APP PUB NO 20190061228A1
SERIAL NO

16175607

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Abstract

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Control of lateral strain and lateral strain ratio (dt/db) between template and substrate through the selection of template and/or substrate thicknesses (Tt and/or Tb), control of template and/or substrate back pressure (Pt and/or Pb), and/or selection of material stiffness are described.

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Patent Owner(s)

Patent OwnerAddress
CITIBANK N A390 GREENWICH STREET NEW YORK NY 10013

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cherala, Anshuman Austin, US 49 706
Choi, Byung Jin Austin, US 117 1980
Fletcher, Edward Brian Austin, US 45 359
GanapathiSubramanian, Mahadevan Cupertino, US 18 268
Im, Se-Hyuk Austin, US 14 55
Khusnatdinov, Niyaz Round Rock, US 65 667
Meissl, Mario Johannes Austin, US 38 151
Schmid, Gerard M Guilford, US 35 341
Sreenivasan, Sidlgata V Austin, US 214 5594
Xu, Frank Y Austin, US 174 2481

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