Nanoelectromechanical devices with metal-to-metal contacts
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United States of America Patent
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May 25, 2021
Grant Date -
Nov 26, 2020
app pub date -
Aug 11, 2020
filing date -
Apr 6, 2017
priority date (Note) -
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Abstract
Nanoelectromechanical systems (NEMS) devices/switches and methods for implementing and fabricating the same with conducting contacts are provided. A nanoelectromechanical system (NEMS) switch can include a substrate; a source cantilever formed over the substrate and configured to move relative to the substrate; a drain electrode and at least one gate electrode formed over the substrate; wherein the source cantilever, drain and gate electrodes comprises a metal layer affixed to a support layer, at least a portion of the metal layer at the contact area extending past the support layer; and an interlayer sandwiched between the support layer and substrate.
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