Air scattering standard for light scattering based optical instruments and tools
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United States of America Patent
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May 25, 2021
Grant Date -
Aug 20, 2020
app pub date -
Feb 19, 2019
filing date -
Feb 19, 2019
priority date (Note) -
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Abstract
An inspection system utilizing an air scatter standard includes one or more illumination sources to generate a beam of illumination, illumination optics configured to focus the beam of illumination into a volume of air contained within a chamber of an inspection chamber, one or more collection optics configured to collect a portion of illumination scattered from the volume of air, a detector configured to receive the collected portion of illumination from the one or more collection optics, a controller including one or more processors, communicatively coupled to the detector, configured to execute a set of program instructions to receive one or more signals from the detector and determine a state of the beam of illumination at one or more times based on a comparison between at least one of the intensity or polarization of the illumination scattered from the volume of air and a predetermine air scatter standard.
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