Polishing composition, method for producing polishing composition, polishing method, and method for producing semiconductor substrate

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United States of America Patent

PATENT NO 11015087
APP PUB NO 20190092974A1
SERIAL NO

16133686

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Abstract

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A polishing composition according to the present invention includes: silica; an anionic water-soluble polymer; at least one compound selected from the group consisting of a phosphonate group-containing compound, a phosphate group-containing compound, and an amino group-containing compound; and a dispersing medium.

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Patent Owner(s)

Patent OwnerAddress
FUJIMI INCORPORATEDNISHIKASUGAI-GUN AICHI 452-8502

International Classification(s)

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  • 2018 Application Filing Year
  • C09K Class
  • 2902 Applications Filed
  • 1876 Patents Issued To-Date
  • 64.65 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances201820192020202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tseng, Tzu-Chun Tongluo Township, TW 6 49

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  • 0 Citation Count
  • C09K Class
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  • 4 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges114261520201 - 1011 - 2021 - 3005010015020025030035040045050055060065070075080085090095010001050110011501200

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