Anti-reflection optical substrates and methods of manufacture

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United States of America Patent

PATENT NO 11009794
APP PUB NO 20190278179A1
SERIAL NO

16292771

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Abstract

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A substrate provided with an anti-reflective coating where the anti-reflective coating is made up of a layer of nanostructures. The nanostructures may be formed by depositing a material such as SiO2 and then using a process such as reactive ion etching in conjunction with an inductively coupled plasma source. Other aspects of the fabrication process are also disclosed.

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Patent Owner(s)

Patent OwnerAddress
ASML HOLDING N VHOLLAND WEIDE EINDHOVEN VELDHOVEN NORTH BRABANT

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kelkar, Parag Vinayak Danbury, US 6 16

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