Electrode assembly for plasma generation
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United States of America Patent
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May 11, 2021
Grant Date -
Feb 21, 2019
app pub date -
Aug 20, 2018
filing date -
Aug 18, 2017
priority date (Note) -
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Abstract
A hollow electrode assembly through which gas from a gas supply can pass and be effused across the casing of the electrode for supplying a gas for a plasma discharge. The gas passing the electrode goes from a higher gas pressure environment inside the electrode to a lower gas pressure environment on the outside of the electrode. The casing of the electrode through which the gas effuses can be a metal or metal allow which provides for a controlled flow of the gas through the wall. The flow rate of the gas can be controlled by one or more of the porosity of the metal or metal alloy used, the type of gas used, the pressure differential between the inside and outside of the electrode, and the temperature of the system. The electrode assembly can be used in and high temperature plasma generators.
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