Design-rule checking for curvilinear device features
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United States of America Patent
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May 4, 2021
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app pub date -
Oct 31, 2019
filing date -
Oct 31, 2019
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Abstract
One illustrative system includes a processor and memory storing instructions that, when executed by the processor, cause the system to receive a device layout including a curvilinear feature, define a plurality of vertices for the curvilinear feature, determine a radius of curvature between a selected vertex in the plurality of vertices and a neighboring vertex in the plurality of vertices, and identify a design rule violation for the curvilinear feature responsive to the radius of curvature being less than a predetermined threshold.
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