Mask assembly and haze acceleration method
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
Apr 20, 2021
Grant Date -
Aug 22, 2019
app pub date -
Feb 22, 2018
filing date -
Feb 22, 2018
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A method of testing a photomask assembly is disclosed. The method includes placing a photomask assembly into a chamber. The photomask assembly includes a pellicle attached to a first side of a photomask. The method further includes exposing the photomask assembly to a radiation source in the chamber. The exposing of the photomask assembly includes illuminating an entirety of an area of the photomask covered by the pellicle throughout an entire illumination time.
First Claim
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International Classification(s)
- 2018 Application Filing Year
- G03F Class
- 2098 Applications Filed
- 1510 Patents Issued To-Date
- 71.98 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- G03F Class
- 62.44 % this patent is cited more than
- 4 Age
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