Valve apparatus
Number of patents in Portfolio can not be more than 2000
United States of America
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Apr 20, 2021
Grant Date -
May 14, 2020
app pub date -
Aug 19, 2019
filing date -
Aug 19, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
A valve apparatus includes a valve block with a main flow path, a first valve installed on the valve block and connected to the main flow path so that when the first valve turns on, a first fluid is supplied from the main flow path to a process chamber via the first valve, and a second valve installed on the valve block and connected to the main flow path so that when the first valve turns off and the second valve turns on, a second fluid is supplied from the main flow path to a waste gas treatment system via the second valve. The main flow path is disposed parallel to a central axis passing through a center of the valve block and two opposing surfaces of the valve block perpendicularly thereto. The main flow path is disposed to be offset from the central axis toward the first valve.
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