High speed atomic force profilometry of large areas

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10969406
SERIAL NO

16538474

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Abstract

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An apparatus and method of operating an atomic force profiler (AFP), such as an AFM, using a feedforward control signal in subsequent scan lines of a large area sample to achieve large throughput advantages in, for example, automated applications.

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Patent Owner(s)

Patent OwnerAddress
BRUKER NANO INC112 ROBIN HILL ROAD GOLETA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fonoberov, Vladimir Santa Barbara, US 7 8
Hand, Sean Michael Santa Barbara, US 2 3
Osborne, Jason Lompoc, US 9 30

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