High temperature substrate heater for use in high and ultra-high vacuum systems
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United States of America Patent
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Mar 9, 2021
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N/A
app pub date -
Nov 1, 2017
filing date -
Nov 1, 2017
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Abstract
A braze-free substrate heating device including a heater block body, a heater block lid, and a heating element. The heating element sits inside the heater block body. The heater block lid is on the heating element, such that the heating element is sandwiched between the heater block lid and the floor of the heater block body. The heating element is held in place by compressing the heater block lid into the heater block body and attaching the heater block lid to the top of the heater block body so that the heating element is fully supported over its surface area, and can maintain uniform thermal contact with the heater block lid and heater block body over its entire surface area.
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