Method for manufacturing a sensor chip for the direct conversion of X-rays, a sensor for the direct conversion of X-rays and the dental radiology apparatus for using such a sensor
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United States of America Patent
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Mar 2, 2021
Grant Date -
Jun 4, 2015
app pub date -
Jun 21, 2012
filing date -
Jun 21, 2012
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Abstract
This invention relates to a method to manufacture a chip to detect the direct conversion of X-rays. It also relates to a direct conversion detector for X-rays using such a chip and dental radiology equipment using at least one such detector. The method to manufacture the wafer comprises a step for applying pressure (3, 4, 4 a) to a powdered polycrystalline semiconductor material and a step for heating (5-9) during a set time period. It comprises a preliminary step for providing an impurity level of at least 0.2% in the polycrystalline semiconductor material.
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