Micro device transferring apparatus and micro device transferring method
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United States of America Patent
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Mar 2, 2021
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N/A
app pub date -
Aug 28, 2019
filing date -
Mar 8, 2019
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Abstract
A micro device transferring apparatus and a micro device transferring method are provided. The micro device transferring apparatus for moving a micro device fixed on an original substrate to a target substrate includes: a stripper on a side of the original substrate away from the micro device, configured to strip the micro device off the original substrate, and an optical tweezer configured to tweeze the micro device from a side of the original substrate provided with the micro device, wherein an accommodating space for accommodating the micro device and the original substrate is between the stripper and the optical tweezer.
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