Acceleration sensor

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10935566
APP PUB NO 20180252744A1
SERIAL NO

15671340

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Provided is an acceleration sensor having a large mass in a movable portion, and realizing high impact resistance. An acceleration sensor element 10a includes an upper substrate 20, a lower substrate 21 spaced apart from the upper substrate 20, and an intermediate substrate 19 provided between the upper substrate 20 and the lower substrate 21. Each of a first movable portion 16, a second movable portion 17, a frame portion 12, a fixed portion 13, and a spring portion 14 constituting the intermediate substrate 19 is configured with two layers of an upper layer and a lower layer, and a stopper portion 18 is provided at one end of the frame portion 12. A distance 31 between an end portion of the first movable portion 16 or the second movable portion 17 and an end portion of the stopper portion 18 in the upper layer and a distance 32 between an end portion of the first movable portion 16 or the second movable portion 17 and an end portion of the stopper portion 18 in the lower layer are different from each other.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
HITACHI LTD6-6 MARUNOUCHI 1-CHOME CHIYODA-KU TOKYO 1008280 ?1008280

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Isobe, Atsushi Tokyo, JP 55 1008
Kamada, Yuudai Tokyo, JP 21 80
Sakuma, Noriyuki Tokyo, JP 77 830
Sekiguchi, Tomonori Tokyo, JP 141 2124
Takubo, Chisaki Tokyo, JP 20 95

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