Capacitor including electrode and dielectric layer each containing silicon, and method for manufacturing capacitor
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United States of America Patent
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Feb 16, 2021
Grant Date -
Aug 15, 2019
app pub date -
Jan 28, 2019
filing date -
Feb 15, 2018
priority date (Note) -
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Abstract
A capacitor includes a first electrode; a second electrode facing the first electrode; and a dielectric layer which is disposed between the first electrode and the second electrode and which is in contact with the first electrode. The first electrode includes a first portion including an interface between the first electrode and the dielectric layer, the dielectric layer includes a second portion including the interface, and the first portion and the second portion each contain silicon. A concentration distribution of the silicon along a thickness direction of the first portion and the second portion includes a convex portion intersecting the interface.
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