Computer implemented method for determining intrinsic parameter in a stacked nanowires MOSFET

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10914703
APP PUB NO 20180156749A1
SERIAL NO

15827206

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Embodiments of the invention determine intrinsic parameters of stacked nanowires/nanosheets GAA MOSFETs comprising Nw nanowires and/or nanosheets, each nanowire/nanosheet being surrounded in an oxide layer, the oxide layers being embedded in a common gate, wherein the method comprises the following steps:

    measuring the following parameters of the MOSFET: number of stacked nanowires/nanosheets NW,width WW,i, of the nanowire/nanosheet number i, i being an integer from 1 to NW,thickness of the nanowire/nanosheet HW,i, number i, i being an integer from 1 to NW,corner radius RW,i of the nanowire/nanosheet number i, i being an integer from 1 to NW, RW,i; calculating, using a processor and the measured parameters, a surface potential x normalized by a thermal voltage ϕT given by ϕT=kBT/q;measuring the total gate capacitance for a plurality of gate voltages;determining, using the measured total gate capacitance and the calculated normalized surface potential, the intrinsic parameter of the stacked nanowires/nanosheets MOSFET.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESPARIS FRANCE PARIS PARIS

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jaud, Marie-Anne Claix, FR 6 695
Lacord, Joris La Murette, FR 5 17
Martinie, Sébastien Saint-Martin le Vinoux, FR 1 14
Poiroux, Thierry Voiron, FR 22 163
Rozeau, Olivier Moirans, FR 12 83

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Aug 9, 2028
11.5 Year Payment $7400.00 $3700.00 $1850.00 Aug 9, 2032
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00