System and method for drying and analytical testing of containers

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United States of America Patent

PATENT NO 10914521
APP PUB NO 20200240709A1
SERIAL NO

16255923

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Abstract

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Embodiments of the present invention provide a system and method to perform drying and testing of organometallic and organosilane precursor source ampoules that have been cleaned for re-use. The drying and quality control testing is performed in a single location with a single apparatus requiring only one manual connection/disconnection step of the ampoule to the apparatus. The testing includes analyses for residual moisture, entrained particulate matter, differential pressure, and helium leak checking.

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Patent Owner(s)

Patent OwnerAddress
VERSUM MATERIALS US LLC8555 S RIVER PARKWAY TEMPE AS 85284

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bernard, Matthew David Tempe, US 1 1
Hopkins, Allison Barbeau Tempe, US 1 1
McDermott, Wayne Thomas Tempe, US 36 423
Pingitore, Michael Altschul Tempe, US 1 1
Siemer, Joseph J Tempe, US 1 1

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