Substrate container, load port apparatus, and substrate treating apparatus
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United States of America Patent
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Feb 2, 2021
Grant Date -
Sep 14, 2017
app pub date -
Jul 28, 2015
filing date -
Sep 5, 2014
priority date (Note) -
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Abstract
A substrate container including a casing, a rack, a casing holder, a casing lifting mechanism, a lid, and a lid holder. When holding of substrates with the rack shifts to holding of the substrates with the casing holder and the lid holder, the casing lifting mechanism moves the casing holder upward, whereby the casing holder moves the substrates upward. When the holding of the substrates with the casing holder and the lid holder shifts to the holding of the substrates with the rack, the casing lifting mechanism moves the casing holder downward, whereby the casing holder moves the substrates downward.
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