Systems and methods for patterning color assignment
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United States of America Patent
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Feb 2, 2021
Grant Date -
Oct 24, 2019
app pub date -
Apr 20, 2018
filing date -
Apr 20, 2018
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Abstract
Systems and methods for multi-patterning in layout design data. A method includes receiving a coloring rule by a computer system. The method includes applying the coloring rule to the layout design data to identify a unique uncolored geometric element corresponding to the rule, by the computer system. The method includes, when the applied rule did not identify the unique uncolored geometric element corresponding to the rule, repeat the receiving and applying processes with a different coloring rule. The method includes, when the applied rule did identify the unique uncolored geometric element corresponding to the rule, assigning a patterning color to the unique uncolored geometric element, by the computer system.
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