Apparatus for treating substrate
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 2, 2021
Grant Date -
N/A
app pub date -
Sep 10, 2019
filing date -
Sep 12, 2018
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An apparatus for treating a substrate includes a developing chamber that performs a developing process on the substrate by supplying a developing solution, a supercritical chamber that treats the substrate by supplying a supercritical fluid, and a transfer chamber having a transfer unit that transfers the substrate W between the developing chamber and the supercritical chamber.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully